Special Device Integration solutions (Vacuum Pump)

Project Introduction:

There are so many process control equipments in the semiconductor or TFT or electronic factories. They are vacuum pump、Scrubber、power meter、Gas detector .. etc. Most of the devices provide the special protocol. In this case, we got to integrate all of the vacuum pumps. My customer needs to know the status of all of the pumps and show the alerts for the operators. Besides, we got to collect all the data in the pumps every second and save into the database. The communication signals are more than 10,000 tags. Real time trend and the historical trend are also a necessary function in these cases. There are more than ten factories uses our system.

System Requirement:

1 set of SCADA (special function)

1 set Real Time DataBase (developed by OPCTechs Corps.)

4 sets Vacuum Pump OPCtechs OPC Server

Many N-Port devices

Conclusions:

Vacuum pump is one of the importance equipment for the semiconductor or TFT or electronic factories. Most of the devices in the automation fields povide the special protocols. The vacuum pump is a very good example. We designed the OPC Server for the vacuum pump and serve for the SCADA and RDB system. OPC Server solve all of the communication affairs. Through the OPC Server, we could use VB and C# to help SCADA and RDB doing what the SCADA can not do.